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发明名称	ION SOURCES, SYSTEMS AND METHODS
摘要	Ion sources, systems and methods are disclosed.
申请公布号	US2012141693(A1)	申请公布日期	2012.06.07
申请号	US201213356854	申请日期	2012.01.24
申请人	WARD BILLY W.;NOTTE, IV JOHN A.;FARKAS, III LOUIS S.;PERCIVAL RANDALL G.;HILL RAYMOND;EDINGER KLAUS;MARKWORT LARS;ADERHOLD DIRK;MANTZ ULRICH;ALIS CORPORATION	发明人	WARD BILLY W.;NOTTE, IV JOHN A.;FARKAS, III LOUIS S.;PERCIVAL RANDALL G.;HILL RAYMOND;EDINGER KLAUS;MARKWORT LARS;ADERHOLD DIRK;MANTZ ULRICH
分类号	H01J27/02;C23C14/46;C23C16/48;H01J37/26	主分类号	H01J27/02
代理机构		代理人
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