发明名称 |
LIQUID CRYSTAL PANEL EXPOSURE PROCESS AND MASK THEREOF |
摘要 |
A liquid crystal panel exposure process using an exposure machine for manufacturing multiple liquid crystal panels is provided. The exposure process includes the following steps: exposuring a glass substrate (20) for manufacturing multiple liquid crystal panels by a first mask (10) which is provided with multiple alignment marks corresponding to subsequent multiple masks, so as to form multiple alignment marks on the glass substrate (20) corresponding to the subsequent multiple masks; according to the order of the subsequent multiple masks, performing alignment process and exposure process on the glass substrate (20) by aligning the multiple alignment marks formed on the substrate (20) with the multiple alignment marks of the subsequent multiple masks respectively, so as to create patterns. To the same liquid crystal panel area, the multiple alignment marks needed for the subsequent multiple masks are provided with different coordinate positions on the glass substrate (20). |
申请公布号 |
WO2012071748(A1) |
申请公布日期 |
2012.06.07 |
申请号 |
WO2010CN79685 |
申请日期 |
2010.12.13 |
申请人 |
SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.;ZHANG, CAILI |
发明人 |
ZHANG, CAILI |
分类号 |
G02F1/133;G03F1/42;G03F7/20;G03F9/00 |
主分类号 |
G02F1/133 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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