发明名称 |
METHOD FOR MANUFACTURING ELECTRONIC DEVICE, METHOD FOR MANUFACTURING EPITAXIAL SUBSTRATE, III NITRIDE SEMICONDUCTOR ELEMENT AND GALLIUM NITRIDE EPITAXIAL SUBSTRATE |
摘要 |
In step S103, a gallium nitride semiconductor layer 13 is grown on an n-type GaN substrate 11. In step S 104, a PL spectrum for the gallium nitride based semiconductor layer in a wavelength region including the yellow band of wavelength and the band edge wavelength of the gallium nitride based semiconductor is measured at room temperature. In step S 106, a screened epitaxial substrate E1 is prepared through selection based on comparison of the photoluminescence spectrum intensity in the yellow band of wavelength and the band edge wavelength with a reference value. In step S107, an electrode 15 for an electron device is formed on the screened epitaxial substrate 13. |
申请公布号 |
EP2169713(A4) |
申请公布日期 |
2012.06.06 |
申请号 |
EP20080791293 |
申请日期 |
2008.07.17 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
SAITOH, YU |
分类号 |
H01L21/66;G01N21/64;H01L21/02;H01L33/00 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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