| 发明名称 |
TIO2-CONTAINING SILICA GLASS, AND OPTICAL MEMBER FOR EUV LITHOGRAPHY |
| 摘要 |
<p>The present invention relates to a TiO 2 -containing silica glass having a TiO 2 content of 7.5 to 12% by mass, a fictive temperature of 1,000°C or higher, and a temperature at which a coefficient of linear thermal expansion is 0 ppb/°C being within th range of 40 to 110°C.</p> |
| 申请公布号 |
KR20120055564(A) |
申请公布日期 |
2012.05.31 |
| 申请号 |
KR20127004203 |
申请日期 |
2010.08.16 |
| 申请人 |
ASAHI GLASS COMPANY LTD. |
发明人 |
KOIKE AKIO;IWAHASHI YASUTOMI;KIKUGAWA SHINYA |
| 分类号 |
C03C3/06;C03C15/00;H01L21/027 |
主分类号 |
C03C3/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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