| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electro-optic device capable of preventing a hillock from being formed on a surface of a pixel electrode and a cavity from being formed at a part where a recess is filled with a flattening insulating film, a projection type display device, and a method of manufacturing the electro-optic device. <P>SOLUTION: On an element substrate 10 of an electro-optic device 100, a flattening insulating film 17 provided on an upper layer side of a reflective pixel electrode 9a includes a doped silicon oxide film 170 as a layer laminated on the pixel electrode 9a. The doped silicon oxide film 170 has a small difference in coefficient of thermal expansion from an aluminum film constituting the pixel electrode 9a. Consequently, even when the flattening insulating film 17 is formed in a heated state, large thermal stress is generated in neither the pixel electrode 9a nor the flattening insulating film 17, so a defect such as a hillock is hardly generated on the surface of the pixel electrode 9a. Further, the doped silicon oxide film 170 has a superior step covering property. <P>COPYRIGHT: (C)2012,JPO&INPIT |
