| 摘要 |
Various embodiments of the present invention are generally directed to a method and apparatus for transferring an XY image to a rotating substrate, such as a semiconductor substrate, storage medium, etc. An XY image pattern comprising a plurality of image elements is divided into a matrix of adjacent tiles. A write beam is used to write the XY image pattern to a rotating substrate by defining a radial path at a selected radius of the rotating substrate, identifying the tiles of said matrix that intersect said radial path, and writing a portion of the XY image pattern at the selected radius using image elements from the identified tiles. |
