SURFACE SHAPE MEASURING APPARATUS

摘要

PURPOSE: A surface shape measuring apparatus is provided to diminish a light saturation and light shortage when detecting light amount because the light amount irradiating to a sample having a different reflectivity is controlled on a pixel basis through a SLM(Spatial Light Modulator). CONSTITUTION: A surface shape measuring apparatus(100) comprises a light source(110), a SLM(120), a photodetector(130), and a control unit(140). The light source irradiates the light to a sample. The SLM is arranged in the optical path between the light source and sample. The SLM spatially controls amount of the light irradiated on the specimen on a pixel unit basis. The photodetector detects the light reflected from a sample. The control unit irradiates the lights to the sample by controlling the light amount by the SLM and detects the lights reflected from the sample.