Temperature control apparatus, processing apparatus, and temperature control method

摘要

Disclosed is an temperature control apparatus including: a resistance heater a resistance value of which changes dependently on a temperature thereof; a fixed resistance connected to the resistance heater in series; a signal generator to output a control signal which has two voltage levels of a first voltage and a second voltage; a switching section to flow a current through the resistance heater and the fixed resistance when the voltage level is the first voltage, and not to flow a current through the resistance heater and the fixed resistance when the voltage level is the second voltage; and a first voltage measuring instrument to measure a voltage value across the fixed resistance at the time when the current flows through the fixed resistance, wherein the signal generator controls the temperature of the resistance heater based on the measured voltage by the first voltage measuring instrument.