| 摘要 |
<p>#CMT# #/CMT# The method involves forming two out of three blocks (111, 112, 113) e.g. elongate or longilineal shape blocks, in a stack of layers of anti-ferromagnetic material and layers of ferromagnetic material resting on a substrate, where the blocks are separated and longilineal, and extended respectively in two main directions that form a non-zero angle between the directions. The blocks are annealed at the temperature greater than the ordering temperature, the blocking temperature or the magnetic ordering temperature of the anti-ferromagnetic material. #CMT#USE : #/CMT# Method for producing a magnetic field detecting and/or measuring device i.e. three-axis magnetic sensor (claimed) e.g. micro-electro-mechanical system (MEMS) or nano-electro-mechanical system (NEMS) type magnetic sensor, that measures earth's magnetic field. #CMT#ADVANTAGE : #/CMT# The method enables producing a sensor with magnetic zones having different and fixed magnetization orientations on the same substrate. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a schematic view representing a three-axis sensor produced by a production method. '(Drawing includes non-English language text)' 111, 112, 113 : Blocks.</p> |
