WIDE-BANDWIDTH MEMS-SCALE PIEZOELECTRIC ENERGY HARVESTING DEVICE

摘要

Micro electro-mechanical system (MEMS) devices for harvesting energy are provided. The devices include beams having piezoelectric properties that are anchored on both ends. An external proof mass can be coupled to the beams, and electrodes that are also coupled to the beams can be configured to extract electrical energy from the beams. The external proof mass can help facilitate vibration, which in turn can induce the stretching mode of the beams to dominate. Systems and methods for maintaining an excitation frequency for devices of this nature are also disclosed. The systems and methods can both help start-up the device to begin harvesting energy, as well as maintain the excitation frequency of the device in a high-power output range.