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摘要
申请公布号
JP4936560(B2)
申请公布日期
2012.05.23
申请号
JP20080060411
申请日期
2008.03.11
申请人
发明人
分类号
C23C14/14;C23C14/06;C23C14/34;H01L21/28;H01L21/285;H01L21/3205;H01L21/768;H01L23/532
主分类号
C23C14/14
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