<p>A process chamber 10 comprising a container (12), a lid (14), and a sealed interface (16) therebetween. The container's interface surface (30) and/or the lid's interface surface (32) includes at least one groove (36) in which a seal (40) is situated. The seal (40) comprises an elastomeric element (50) and a metallic element (60). The elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface (16) sequentially during its conversion to a sealed condition. And/or the elastomeric element (50) and the metallic element (60)can be arranged and adapted to seat the chamber's interface in series once the lid (14) is in its sealed condition.</p>
申请公布号
EP1953802(A3)
申请公布日期
2012.05.23
申请号
EP20080250379
申请日期
2008.02.01
申请人
PARKER-HANNIFIN CORPORATION
发明人
DATTA, AMITAVA;AMOS, PETER G.;MORE, DOMINICK G.;CORNETT, KENNETH W.;PAYNE, JEREMY