| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve a method of imprinting used in a contact lithography process. <P>SOLUTION: The present invention provides a method for separating a mold (136) from a solidified imprinting material that includes creating deformation in a template (214) including the mold. The deformation (P2) is sufficient to create returning force greater than adhesion force between the solidified imprinting material and the mold. For example, the deformation may result from a pressure difference created by a pump system (546) between the mold and a side face of the template on the side opposite to the mold. In this manner, the distortion may be undulations in the template of magnitude enough to come into contact with a substrate on which the solidified imprinting material is disposed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
