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发明名称
VERFAHREN ZUM ÄTZEN EINER OPFERSCHICHT FÜR EINE MIKROBEARBEITETE STRUKTUR
摘要
申请公布号
AT556028(T)
申请公布日期
2012.05.15
申请号
AT20060819141T
申请日期
2006.10.25
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES
发明人
BOREL, STEPHAN;BILDE, JEREMY
分类号
B81C1/00
主分类号
B81C1/00
代理机构
代理人
主权项
地址
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