APPARATUS FOR TESTING SUBSTRATE

摘要

PURPOSE: An apparatus for inspecting a substrate is provided to efficiently inspect the electrical property of a substrate which is highly integrated and becomes larger by easily increasing the number of test pins per a unit area. CONSTITUTION: A supporter(110) supports a substrate(11). A tester is arranged on a top of the supporter. The tester includes a circuit board(120) and a test pin(130) which is expanded and shrunk to top and bottom. The test pin is vertically expanded to the supporter from the circuit board. A support block(122) supports the test pin on the circuit board.