THIN-FILM FORMATION SYSTEM AND ORGANIC EL DEVICE MANUFACTURING SYSTEM

摘要

PURPOSE: A thin-film formation system and a manufacturing system of an organic EL device are provided to easily reduce an apparatus installation space by parallely arranging a carrying apparatus in substrate carrying in or out positions or a carrier apparatus in a deposition section. CONSTITUTION: A upper transfer room(3a) is inserted between a loading room(2) and a film forming chamber(1). An auto guide vehicle(23a) designed to be used in a vacuum environment is installed in the transfer room. A lower transfer room(3b) is inserted between the film forming chamber and an unloading chamber(8) taking out a substrate after being processed. The lower transfer room includes an electrode forming room(5) forming an electrode on a substrate(16) and a loader(7) for a bonded substrate. An arrangement device arranges a substrate carried to the film forming chamber and a deposition mask(17) provided from a mask room(9).