| 发明名称 |
SAPPHIRE SUBSTRATES AND METHODS OF MAKING SAME |
| 摘要 |
A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, γ-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μn/cm, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about . |
| 申请公布号 |
UA98314(C2) |
申请公布日期 |
2012.05.10 |
| 申请号 |
UA20090006859 |
申请日期 |
2007.12.21 |
| 申请人 |
SAINT-GOBAIN CERAMICS & PLASTICS, INC. |
发明人 |
TANIKELLA, BRAHMANANDAM V.;SIMPSON, MATTHEW A.;CHINNAKARUPPAN, PALANIAPPAN;RIZZUTO, ROBERT A.;VEDANTHAM, RAMANUJAM |
| 分类号 |
B24B37/005;H01L21/20;H01L21/304 |
主分类号 |
B24B37/005 |
| 代理机构 |
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