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发明名称
SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELAXATION COMPENSATION
摘要
申请公布号
EP2449366(A2)
申请公布日期
2012.05.09
申请号
EP20100800259
申请日期
2010.06.25
申请人
KLA-TENCOR CORPORATION
发明人
ROTTER, LAWRENCE D.;WANG, DAVID Y.;SHAUGHNESSY, DERRICK;SENKO, MARK
分类号
G01N25/72;G01N21/63;H01L21/66
主分类号
G01N25/72
代理机构
代理人
主权项
地址
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