| 摘要 |
A three-dimensional shape measuring device for measuring three-dimensional shape information quickly and accurately comprises a light projecting section (20) for projecting a light pattern having a brightness varying periodically according to the position onto a partial area of a transfer stage (52) on which a measurement object (12) is measured, a first line sensor (36) for imaging a light pattern projection area (14), a second line sensor (38) for imaging a light pattern non-projection area (16), and an image analysis/drive control section (40) for computing the phase of the light pattern in a pixel included in an image (86) produced by removing the background information from the image (82) captured by the first line sensor (36) and the image (84) captured by the second line sensor (38) from the brightness values of the pixel and the peripheral pixels in the image (86) and computing the height information on the measurement object (12) from the computed phase. The first line sensor (36) and the second line sensor (38) are so arranged that they can simultaneously image the light pattern projection area (14) and the light pattern non-projection area (16), respectively. |
