| 发明名称 |
Patterning of Nanostructures |
| 摘要 |
A technique for forming nanostructures including a definition of a charge pattern on a substrate and introduction of charged molecular scale sized building blocks (MSSBBs) to a region proximate the charge pattern so that the MSSBBs adhere to the charge pattern to form the feature. |
| 申请公布号 |
US2012108041(A1) |
申请公布日期 |
2012.05.03 |
| 申请号 |
US201213347662 |
申请日期 |
2012.01.10 |
| 申请人 |
JACOBSON JOSEPH M.;KONG DAVID;ANANT VIKAS;SALOMON ASHLEY;GRIFFITH SAUL;DELHAGEN WILL;AGNIHOTRI VIKRANT;MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
JACOBSON JOSEPH M.;KONG DAVID;ANANT VIKAS;SALOMON ASHLEY;GRIFFITH SAUL;DELHAGEN WILL;AGNIHOTRI VIKRANT |
| 分类号 |
H01L21/20;C23C14/02;C23C14/04;C23C16/04;C23C16/455 |
主分类号 |
H01L21/20 |
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