| 摘要 |
<p>[Problem] To measure a three-dimensional shape of an object to be measured with good accuracy. [Solution] A measurement unit (20) which obtains, by repeatedly taking images of an object to be measured while changing a phase of a stripe pattern with which an object to be measured (11) is irradiated, data of light intensity changes from positions on the object to be measured (11), a focus position change unit (30) which changes a focus position when taking the images by the measurement unit (20), a control unit (101) which controls the measurement unit (20) and the focus position change unit (30) to obtain the data of the light intensity changes each time a focus position is changed, and a coordinate measurement unit (32) which measures the coordinates of positions on the object to be measured (11) on the basis of the data of the light intensity changes of the respective focus positions.</p> |
