METHOD FOR CALLING FUNCTIONS OF REACTION CHAMBER AND SHEET TRANSMITTING CHAMBER FACING TO CLUSTER SEMICONDUCTOR DEVICE

摘要

A method for calling function of reaction chamber and sheet transmitting chamber facing to a cluster semiconductor device is provided. The method includes the following steps: partitioning each function in the cluster semiconductor device, and constructing the corresponding function modules according to different functions; creating a command assignment table and a parameter assignment table; analyzing the external command received by the cluster semiconductor device according to the command assignment table and the parameter assignment table, and determining which function module to process the command; executing independently or cooperating with other function modules or not executing the command by the function module which takes charge of processing the command according to the present state; returning the result of the command executed independently or cooperating with other function modules to the command dispatcher together, and finishing the function calling of reaction chamber and sheet transmitting chamber. The method can manage the scheduling problem of multiple function modules in the cluster device effectively, make each function module of the device combine with each other, finish more complex functions, and improve the using efficiency of the device function.