发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes: a first conductivity type transistor and a second conductivity type transistor, wherein each of the first conductivity type transistor and the second conductivity type includes a gate insulating film formed on a base, a metal gate electrode formed on the gate insulating film, and side wall spacers formed at side walls of the metal gate electrode, wherein the gate insulating film is made of a high dielectric constant material, and wherein offset spacers are formed between the side walls of the metal gate electrode and the inner walls of the side wall spacers in any one of the first conductivity type transistor and the second conductivity type transistor, or offset spacers having different thicknesses are formed in the first conductivity type transistor and the second conductivity type transistor.
申请公布号 US2012104509(A1) 申请公布日期 2012.05.03
申请号 US201113278809 申请日期 2011.10.21
申请人 MATSUMOTO KOICHI;SONY CORPORATION 发明人 MATSUMOTO KOICHI
分类号 H01L27/092;H01L21/20;H01L21/28;H01L29/772 主分类号 H01L27/092
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