KESTERITE LAYER FABRICATION FOR THIN FILM SOLAR CELLS
摘要
A Kesterite film is vacuum deposited and annealed on a substrate. Deposition is conducted at low temperature to provide good composition control and efficient use of metals. Annealing is conducted at a high temperature for a short period of time. Thermal evaporation, E-beam evaporation or sputtering in a high vacuum environment may be employed as part of a deposition process.
申请公布号
WO2012055737(A2)
申请公布日期
2012.05.03
申请号
WO2011EP68254
申请日期
2011.10.19
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;IBM UNITED KINGDOM LIMITED;WANG, KEJIA;SUPRATIK, GUHA