发明名称 KESTERITE LAYER FABRICATION FOR THIN FILM SOLAR CELLS
摘要 A Kesterite film is vacuum deposited and annealed on a substrate. Deposition is conducted at low temperature to provide good composition control and efficient use of metals. Annealing is conducted at a high temperature for a short period of time. Thermal evaporation, E-beam evaporation or sputtering in a high vacuum environment may be employed as part of a deposition process.
申请公布号 WO2012055737(A2) 申请公布日期 2012.05.03
申请号 WO2011EP68254 申请日期 2011.10.19
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION;IBM UNITED KINGDOM LIMITED;WANG, KEJIA;SUPRATIK, GUHA 发明人 WANG, KEJIA;SUPRATIK, GUHA
分类号 H01L31/18 主分类号 H01L31/18
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