CONTACT-TYPE SEALED PROBE APPARATUS ADOPTING A VOLTAGE-APPLYING SYSTEM

摘要

The present invention relates to an improvement in the performance of one or more surface contact-type probes. More particularly, the present invention relates to a probe apparatus for measuring constant-pressure electric resistance (Korean Patent Registration No. 10-0981677 and PCT patent application No. KR2009-006449) which is developed to solve the problem of non-equivalency in the contact between a plurality of electric resistance measuring cores arranged in parallel with each other and the surface of a sample. A voltage-applying system is adopted and a lead wire penetrates through a pneumatic reservoir in a vertical direction to utilize the probe apparatus for measuring constant-pressure electric resistance, improve the performance of the apparatus, and simplify the structure of the apparatus.