发明名称 METHOD FOR MAKING A PLANAR MEMBRANE
摘要 A method for determining a minimum tension compensation stress which will have a membrane of a thickness of less than or equal to one micrometer, secured to a frame, having, in the absence of any external stress, a desired deflection. The membrane can be made as planar as possible in absence of any external stress, and its thickness can be less than or equal to one micrometer.
申请公布号 US2012100719(A1) 申请公布日期 2012.04.26
申请号 US201013377319 申请日期 2010.06.17
申请人 CONSTANCIAS CHRISTOPHE;DALZOTTO BERNARD;FOURNEL FRANK;MICHALLON PHILIPPE;MORICEAU HUBERT;POUTEAU VALERIE;COMMISARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT 发明人 CONSTANCIAS CHRISTOPHE;DALZOTTO BERNARD;FOURNEL FRANK;MICHALLON PHILIPPE;MORICEAU HUBERT;POUTEAU VALERIE
分类号 H01L21/31;G01N3/08 主分类号 H01L21/31
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