SCREEN PRINTING DEVICE AND SCREEN PRINTING METHOD

摘要

Provided are a screen printing device and a screen printing method such that, in a configuration which horizontally moves an imaging unit having two imaging optical axes for imaging a substrate and a mask plate, substrate positioning accuracy can be improved by appropriately correcting errors in the relative positions of the imaging optical axes or position errors caused by movement of the imaging unit. An optical axes calibration processing step of detecting the relative positions between the imaging optical axes in the horizontal direction, and a surface correction data preparation processing step of detecting a localized positioned misregistration in the imaging optical axes caused by the movement of the imaging unit, are performed prior to a mark imaging step that is performed with the aim of position detection of fiducial marks for positioning of the substrate and mask, and a pre-production accuracy evaluation step for evaluating substrate positioning accuracy using a validation substrate and mask prior to starting production, and a post-production accuracy evaluation step of evaluating substrate positioning accuracy using an actual production substrate and mask subsequent to starting production, are performed.