| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laminated film which has sufficient gas-barrier properties and sufficiently suppresses deterioration in the gas-barrier properties even when the film is bent. <P>SOLUTION: The laminated film includes a base and at least one thin film layer formed on at least one surface of the base, wherein at least one layer of the thin film layer(s) comprises silicon, oxygen and carbon, and also, in a carbon distribution curve showing the relation between the distance from the surface of the thin film layer in the film thickness direction of the layer and the ratio of the quantity of carbon atoms to the total of silicon atoms, oxygen atom and the carbon atoms, all conditions of: (i) the carbon distribution curve has the maximum value and the minimum value; (ii) the maximum value of the carbon distribution curve is ≤5at%; and (iii) at least one maximum value of ≥1at% is present in the carbon distribution curve are satisfied. <P>COPYRIGHT: (C)2012,JPO&INPIT |
