| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a solid state image element having a waveguide structure and suppressed in shading. <P>SOLUTION: The center position of each of micro lenses 12, the center position of each of color filters 10, the entrance center position of each of waveguides 15, and the opening center position of each of light-shielding layers 6 are shifted from the center of a corresponding light-receiving element 3 to the center direction of an effective image pickup region. The shift amount is set by multiplying an aberration correcting coefficient a1 to an assumed shift amount obtained from the difference between the position of a light on an optical path obtained by assuming that the light is refracted in accordance with the difference in refractive index between the materials of both sides of boundaries and has an optical path to the center of a light-receiving element 3 and the position corresponding to the center of the light-receiving element, in a boundary where a main light incident from the center of an exit pupil of the camera lens to the center position of each microlens 12, and an aberration correcting coefficient a2 to the assumed shift amount, wherein a1<a2 in range 0.39 to 1.26. <P>COPYRIGHT: (C)2012,JPO&INPIT |
