METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a liquid crystal display device having a large retention volume in a pixel.

SOLUTION: A method of manufacturing a liquid crystal display device includes: a process of forming a thin film transistor including a first electrode to which a video signal line is connected and a second electrode connected to a pixel electrode on a first substrate; a process of forming a first silicon nitride film above the second electrode; a process of forming an organic insulating film above the first silicon nitride film; a process of forming a capacitor electrode above the organic insulating film; a process of forming a second silicon nitride film at a temperature which is lower than the film formation temperature of the first silicon nitride film above the capacitor electrode and below the pixel electrode after forming the organic insulating film; and a process of forming a contact hole that penetrates through the first silicon nitride film and the second silicon nitride film and for electrically connecting the second electrode to the pixel electrode on the second electrode.

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