USING OF INTERFEROMETER AS HIGH SPEED VARIABLE ATTENUATOR

摘要

PROBLEM TO BE SOLVED: To provide a variable attenuator which satisfies necessary performance conditions to be used in a sub system of a lithographic apparatus used for controlling a dose of radiation in a lithographic exposure process.

SOLUTION: A system and method provides a high speed variable attenuator. The attenuator can be used within a lithographic apparatus to control intensity of radiation of one or more correction pulses used to correct a dose of the radiation subsequently to an initial pulse of the radiation.

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