DEPOSITING SYSTEM FOR SUBSTRATE AND DSPOITING METHOD FOR THE SAME

摘要

PURPOSE: Substrate depositing system and method are provided to reduce times required for operational process by including a mask storing chamber and replacing masks without interruption of the operational processes. CONSTITUTION: A substrate depositing system includes a substrate loading chamber(110), a substrate unloading chamber(120), at least one processing chamber(200), and a mask storing chamber(300). A substrate is loaded at the substrate loading chamber. The substrate is transferred to the substrate unloading chamber. The processing chamber is arranged between the substrate loading chamber and the substrate unloading chamber. The mask storing chamber is in connection with one side of the processing chamber.