| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mount device capable of suppressing the displacement of a mounted article due to thermal expansion or thermal shrinkage. <P>SOLUTION: A mount device comprises a mounting plate for mounting a mounted article; a base on which the mounting plate is placed; a first supporting member which is arranged between the mounting plate and the base to support the mounting plate, regulates the movement in an X-direction of the mounting plate to the base, and accepts the movement in a Y-direction, when defining two directions which are parallel with a surface of the mounting plate on which the mounted article is placed and vertical to each other as the X-direction and the Y-direction; a second supporting member which is arranged between the mounting plate and the base to support the mounting plate, and accepts the movement in the X-direction and the Y-direction of the mounting plate to the base; and a third supporting member which is arranged between the mounting plate and the base to support the mounting plate, and accepts the movement in the X-direction and the Y-direction of the mounting plate to the base; and a regulating member which is arranged between the mounting plate and the base, and regulates the movement in an X-direction and in a Y-direction of the mounting plate to the base. <P>COPYRIGHT: (C)2012,JPO&INPIT |
