| 摘要 |
Purpose: To provide an exposure drawing device which forms necessary alignment marks for drawing patterns of electrical circuits. Solution: An exposure drawing device (10) comprises: a substrate input part (20) for disposing a substrate (CB) coated with a photosensitive layer to a substrate calibration position; a calibration part (30) for calibrating the substrate disposed to the substrate calibration position; a mark forming part (40) for forming a first mark and a second mark on the first side and second side of the substrate calibrated by the calibration part; and a drawing part (60) for drawing patterns of electrical circuits on the first side and the second side of the substrate. |
