发明名称 |
HOUSING FOR AN INFRARED RADIATION MICRO DEVICE AND METHOD FOR FABRICATING SUCH HOUSING |
摘要 |
<p>Infrared radiation micro device, cover for such a device and method for its fabrication, the device comprising a substrate and a cover and an infrared radiation detecting, emitting or reflecting infrared micro unit, the infrared micro unit being arranged in a cavity defined between the substrate and the cover, the cover comprising an antireflective surface texture to enhance the transmissibility of infrared radiation, wherein a distance frame formed in an additive process on the substrate side of the cover and/or the cover side of the substrate is arranged between substrate and cover.</p> |
申请公布号 |
EP2443655(A1) |
申请公布日期 |
2012.04.25 |
申请号 |
EP20100725764 |
申请日期 |
2010.06.21 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;ULIS SAS |
发明人 |
REINERT, WOLFGANG;QUENZER, JOCHEN;TINNES, SEBASTIEN;ROMAN, CECILE |
分类号 |
H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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