发明名称 |
Simplified particle emitter and method of operating thereof |
摘要 |
An emitter assembly for emitting a charged particle beam along an optical axis is described. The emitter assembly being housed in a gun chamber and includes an emitter having an emitter tip, wherein the emitter tip is positioned at a first plane perpendicular to the optical axis and wherein the emitter is configured to be biased to a first potential, an extractor having an opening, wherein the opening is positioned at a second plane perpendicular to the optical axis and wherein the extractor is configured to be biased to a second potential, wherein the second plane has a first distance from the first plane of 2.25 mm and above.
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申请公布号 |
EP2444990(A1) |
申请公布日期 |
2012.04.25 |
申请号 |
EP20100187979 |
申请日期 |
2010.10.19 |
申请人 |
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH |
发明人 |
LANIO, STEFAN;FROSIEN, JUERGEN |
分类号 |
H01J37/063;H01J37/06;H01J37/08;H01J37/09;H01J37/16 |
主分类号 |
H01J37/063 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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