发明名称 |
Method for producing a nanoporous substrate |
摘要 |
Nanoporous substrate with fine pores having a diameter from 3 to 40 nm arranged with less than 60 nm periodicity is prepared by a method comprising the steps of coating amphipathic block copolymer on a substrate, forming a film containing hydrophilic cylinders aligned perpendicularly to the surface of the film on a substrate, and immersing the substrate into a solution containing an etchant.
|
申请公布号 |
US8163189(B2) |
申请公布日期 |
2012.04.24 |
申请号 |
US20060093343 |
申请日期 |
2006.11.14 |
申请人 |
IYODA TOMOKAZU;KAMATA KAORI;WATANABE RYOKO;TOKYO INSTITUTE OF TECHNOLOGY |
发明人 |
IYODA TOMOKAZU;KAMATA KAORI;WATANABE RYOKO |
分类号 |
H01L21/302;B82B3/00 |
主分类号 |
H01L21/302 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|