发明名称 Method for producing a nanoporous substrate
摘要 Nanoporous substrate with fine pores having a diameter from 3 to 40 nm arranged with less than 60 nm periodicity is prepared by a method comprising the steps of coating amphipathic block copolymer on a substrate, forming a film containing hydrophilic cylinders aligned perpendicularly to the surface of the film on a substrate, and immersing the substrate into a solution containing an etchant.
申请公布号 US8163189(B2) 申请公布日期 2012.04.24
申请号 US20060093343 申请日期 2006.11.14
申请人 IYODA TOMOKAZU;KAMATA KAORI;WATANABE RYOKO;TOKYO INSTITUTE OF TECHNOLOGY 发明人 IYODA TOMOKAZU;KAMATA KAORI;WATANABE RYOKO
分类号 H01L21/302;B82B3/00 主分类号 H01L21/302
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