发明名称 |
Thin film piezoelectric vibrator, thin film piezoelectric bulk acoustic wave resonator, and radio-frequency filter using such resonator |
摘要 |
A thin film piezoelectric bulk acoustic wave resonator has a multilayer structure including a piezoelectric thin film, a first metal electrode film, and a second metal electrode film. At least a part of the piezoelectric thin film is interposed between the first and second metal electrodes. A resonance part and a connection part are formed on an insulating substrate as films by a thin film forming apparatus. The resonance part vibrates in radial extension mode with a center of the piezoelectric thin film used as a node, the piezoelectric thin film of two resonance parts is polarized in a direction perpendicular to a film surface, and a width of the connection part is one-fourth or less of a width of two resonance parts. |
申请公布号 |
US8164399(B2) |
申请公布日期 |
2012.04.24 |
申请号 |
US201113064564 |
申请日期 |
2011.03.31 |
申请人 |
ISOBE ATSUSHI;ASAI KENGO;MATSUMOTO HISANORI;HITACHI, LTD. |
发明人 |
ISOBE ATSUSHI;ASAI KENGO;MATSUMOTO HISANORI |
分类号 |
H03H9/205 |
主分类号 |
H03H9/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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