NEEDLE TYPE PROBE AND METHOD OF MANUFACTURING THE NEEDLE TYPE PROBE

摘要

PURPOSE: A needle type probe and a manufacturing method thereof are provided to prevent the deformation of a needle type probe in a repetitive test by reducing stress of a first metal layer due to palladium with a second metal layer. CONSTITUTION: A first metal layer(110) include palladium. A second metal layer(120) includes nickel. The first metal layer and the second metal layer are alternatively laminated. The thickness of the first metal layer is 3 to 5 um. The thickness of the second metal layer is 5 to 12 um. The first metal layer and the second metal layer are thermally process at 100 to 200 degrees centigrade for 10 to 30 minutes.