发明名称 |
DUAL PATH GAS DISTRIBUTION DEVICE |
摘要 |
An apparatus for deploying two fluids separately into a reaction chamber is provided. The apparatus includes a first distribution network that is formed on a plate having a distribution face and a dispensing face. The first distribution network is defined by a plurality of recessed channels on the distribution face. The plurality of recessed channels includes a plurality of thru-ports that extend from the plurality of recessed channels to the dispensing face. The apparatus further includes a second distribution network that has passages formed below the plurality of recessed channels and above the dispensing face. A first set of ports extends from the passages to the distribution face and a second set of ports extends from a top surface of the distribution face to the dispensing face. |
申请公布号 |
US2012090688(A1) |
申请公布日期 |
2012.04.19 |
申请号 |
US201113332104 |
申请日期 |
2011.12.20 |
申请人 |
DEDONTNEY JAY BRIAN;INTERMOLECULAR, INC. |
发明人 |
DEDONTNEY JAY BRIAN |
分类号 |
F15D1/00 |
主分类号 |
F15D1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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