| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve electrical characteristics in a wiring structure. <P>SOLUTION: Graphene wiring comprises: an insulating film 13 with a wiring groove; first catalyst films 15 formed on the insulating film on both side surfaces in the wiring groove; and first graphene layers 16 formed on the catalyst films on the both side surfaces in the wiring groove, and each composed of a plurality of graphene sheets laminated in a direction perpendicular to the both side surfaces. <P>COPYRIGHT: (C)2012,JPO&INPIT |
