发明名称 MANUFACTURING METHOD OF PIEZOELECTRIC DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric device capable of reducing manufacturing man-hours in mass production. <P>SOLUTION: A manufacturing method of a piezoelectric device includes: a crystal vibration piece preparation step S1 of preparing a crystal vibration piece 10 having an extraction electrodes 15a and 16a; a positioning step S2 of placing the crystal vibration piece 10 in a positioning part 31 of a guide plate 30 and positioning the crystal vibration piece 10; a guide plate mounting step S3 of mounting the guide plate 30 on one side of a joint device 60; a package base mounting step S4 of mounting a package base 21 having a resin projection 24 to be joined to the extraction electrode 15a of the crystal vibration piece 10 and a resin projection 25 to be joined to the extraction electrode 16a of the crystal vibration piece 10 on the other side of the joint device 60; an aligning step S5 of aligning the guide plate 30 and the package base 21 so that the extraction electrode 15a faces the resin projection 24 and the extraction electrode 16a faces the resin projection 25; and a joining step S6 of joining the extraction electrode 15a to the resin projection 24 and the extraction electrode 16a to the resin projection 25 by the joint device 60 after aligning the guide plate 30 and the package base 21. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012079954(A) 申请公布日期 2012.04.19
申请号 JP20100224596 申请日期 2010.10.04
申请人 SEIKO EPSON CORP 发明人 KOBAYASHI TAKAHIRO
分类号 H03H3/02;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/313 主分类号 H03H3/02
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