METHOD FOR IMPLEMENTING GUI PLATFORM FOR IC EQUIPMENT CONTROL SOFTWARE

摘要

The present invention relates to a method for implementing Graphical User Interface (GUI) platform for integrate circuit (IC) equipment controlling software, which includes the following steps: developing corresponding IC equipment driver module and drawing GUI platform interface according to the characteristics of the IC equipments produced by different manufacturers; connecting the monitor mainframe of the IC equipment with a controller through the IC equipment driver module and forming a communication network; and, reading/writing controller data through the communication network by the IC equipment driver module, and mapping the data to universal data layer of the GUI platform. The GUI platform interface uses the universal data layer to perform data real-time display, control and abnormity processing, and thus, the GUI platform for the IC equipment control software is implemented. The present invention implements cross-platform mechanism, improves the cluster monitoring capacity of wafer manufacture equipment, satisfies the user demand of flexible construction and configuration of Human-Machine interface of corresponding control system, enables rapid construction of the whole producing process in a short time, and ensure the demand of producing startup ahead of time.