发明名称 UNDERFILL AGENT FOR FLIP-CHIP CONNECTION, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE USING IT
摘要 <P>PROBLEM TO BE SOLVED: To provide an underfill agent composition which can form a thin film of large area stably and can impart durable solder connectivity excellent as an underfill agent, and to provide a manufacturing method of a semiconductor device using the composition. <P>SOLUTION: The liquid wafer level underfill agent composition capable of corresponding to B-stage contains (A) epoxy resin, (B) a flux hardener, (C) an imidazole catalyst, (D) a volatile organic solvent, and (E) a porous inorganic filler having a pore volume of 0.3-0.7 cm<SP POS="POST">3</SP>/g and the surface covered with silicon oxide. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012079872(A) 申请公布日期 2012.04.19
申请号 JP20100222833 申请日期 2010.09.30
申请人 SHIN ETSU CHEM CO LTD 发明人 SUMIDA KAZUMASA;FUKUI KENJI
分类号 H01L23/29;C08K5/09;C08K5/17;C08K5/3445;C08K9/02;C08L61/10;C08L63/00;H01L21/60;H01L23/31 主分类号 H01L23/29
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