发明名称 High voltage device having reduced on-state resistance
摘要 A semiconductor device includes a semiconductor substrate, a source region and a drain region formed in the substrate, a gate structure formed on the substrate disposed between the source and drain regions, and a first isolation structure formed in the substrate between the gate structure and the drain region, the first isolation structure including projections that are located proximate to an edge of the drain region. Each projection includes a width measured in a first direction along the edge of the drain region and a length measured in a second direction perpendicular to the first direction, and adjacent projections are spaced a distance from each other.
申请公布号 US8159029(B2) 申请公布日期 2012.04.17
申请号 US20080256009 申请日期 2008.10.22
申请人 SU RU-YI;CHIANG PUO-YU;GONG JENG;HUANG TSUNG-YI;TSAI CHUN-LIN;CHOU CHIEN-CHIH;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 SU RU-YI;CHIANG PUO-YU;GONG JENG;HUANG TSUNG-YI;TSAI CHUN-LIN;CHOU CHIEN-CHIH
分类号 H01L29/76 主分类号 H01L29/76
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