SUCTION TABLE

摘要

PURPOSE: An adsorption table is provided to adjust the size or distribution of absorbing power with respect to a substrate by changing a flow state of leakage generated in a porous material. CONSTITUTION: A vacuum exhaust device reduces a hollow space. The rear surface of a stage(11) is covered by a sealing member(21). The sealing member has no air permeability. A leakage hole(23) is formed on a part of the sealing member. A leakage is generated through a porous plate from the leakage hole when the pressure of the hollow space is reduced.