Method and system for scribing a multilayer panel

摘要

METHOD AND SYSTEM FOR SCRIBING A MULTILAYER PANEL [0049] The present invention provides method of scribing a multilayer panel. The method comprises (a) providing a multilayer panel comprising a substrate layer, a transparent conductive layer disposed thereupon, a first semiconducting layer disposed upon the transparent conductive layer; (b) configuring the multilayer panel relative to a laser machining device, the machining device comprising a laser head and an optical sensor; (c) inducing a motion of the laser head relative to the multilayer panel such that a laser beam contacts the panel along a transverse line across the panel, the laser beam incident upon the panel having sufficient energy to ablate one or more layers of the multilayer panel within a zone irradiated by the laser beam irradiated to provide a scribed panel; (d) simultaneously irradiating the scribed panel with a first light source; and (e) detecting the light emerging from the scribed panel at the optical sensor in real time. Also provided is a system for scribing a multilayer panel. Providing a multilayer panel ~12 Configuring the multilayer panel relative 14 to a laser machining device Inducing a motion of a laser head disposed in the laser machining device relative 16 to the multilayer panel Irradiating a zone of the multilayer 18 panel with a laser beam Contacting the laser beam and the multilayer 20 panel such that the laser beam traverses a line across the multilayer panel Ablating one or more layers of the 22 multilayer panel to provide a scribed panel Simultaneously irradiating a zone of 24 the scribed panel with a first light source Detecting light emerging from the scribed panel at an optical sensor in real time, wherein the optical -26 sensor is disposed in the laser machining device