Rotary table device for evacuated process chamber for hard coating of substrates of e.g. drill bit, has substrate holder and internal gear respectively rotating around axes during fixed holding and/or rotational movement of table

摘要

The device has a rotary table (4) on which a planetary gear is rotatably supported, where a fixed connection is formed between a sun gear (5) of the planetary gear and the table. An internal gear (11) is rotatably supported by a bearing on the sun gear, and a pivot bearing is provided in the internal gear. A substrate holder (9) and the internal gear do not form intrinsic rotation and respectively rotate around axes during fixed holding of the table and/or during rotational movement of the table against a drive plate (1), a drive shaft (2) or a drive wheel (3).