发明名称 MANUFACTURING METHOD OF SOLID-STATE IMAGE PICKUP DEVICE, SOLID-STATE IMAGE PICKUP DEVICE, AND ELECTRONIC EQUIPMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a solid-state image pickup device which can enlarge the occupied area of an optical filter to enhance the light reception amount at a photoelectric conversion part despite the provision of a color mixture prevention film between the optical filters for different colors disposed above the photoelectric conversion part. <P>SOLUTION: A first island-shaped pattern independent as each of color filters R, B, and G is formed on some of a plurality of photoelectric conversion parts 21 arrayed on the surface side of a substrate 11. In addition, a color mixture prevention film 31 is formed on the side wall of the first pattern. After that, a second island-shaped pattern independent as a white filter W is formed on the remaining ones of the plurality of photoelectric conversion parts 21 so as to sandwich the color mixture prevention film 31 between the first and second patterns. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012074521(A) 申请公布日期 2012.04.12
申请号 JP20100217861 申请日期 2010.09.28
申请人 SONY CORP 发明人 ITO TOMOMI;SUZUKI RYOJI;NATORI TAICHI
分类号 H01L27/14;H04N5/369;H04N9/07 主分类号 H01L27/14
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