| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a biosensor capable of observing an object to perform sensing with a microscope or the like while performing sensing simultaneously. <P>SOLUTION: According to this invention, there is provided a biosensor having an FET sensor comprising a transparent base material, a gate electrode on the transparent base material, a semiconductor film covering the gate electrode, a source electrode and a drain electrode each arranged to have ohmic contact with the semiconductor film, first insulator films each covering the source electrode and the drain electrode, a second insulator film which is arranged on the semiconductor film on the gate electrode and on which an object to be measured is arranged. <P>COPYRIGHT: (C)2012,JPO&INPIT |
